标准摘要
[中文适用范围]： 本文件定义了光学界面分析领域的表面化学分析术语，包括椭圆光度术、拉曼光谱和非线性光学技术以及一般光学术语。 [外文原描述]： This document defines terms for surface chemical analysis in the area of optical interface analysis including ellipsometry, Raman spectroscopy and nonlinear optical techniques as well as general optical terms.
英文名称Surface chemical analysis — Vocabulary — Part 3: Terms used in optical interface analysis