标准摘要
[中文适用范围]： 本文件为通过俄歇电子能谱和 X 射线光电子能谱定量分析均质材料时，测量和使用实验确定的相对灵敏度因子提供指导。所述方法仅适用于多晶和非晶材料，因为未涉及单晶样品固有的影响。 [外文原描述]： This document gives guidance on the measurement and use of experimentally-determined relative sensitivity factors for the quantitative analysis of homogeneous materials by Auger electron spectroscopy and X-ray photoelectron spectroscopy. The methods described only apply to polycrystalline and amorphous materials, as effects inherent to single-crystal samples are not addressed.
英文名称Surface chemical analysis — Auger electron spectroscopy and X-ray photoelectron spectroscopy — Guide to the use of experimentally determined relative sensitivity factors for the quantitative analysis of homogeneous materials