标准摘要
[中文适用范围]： 本国际标准规定了用接触式探针轮廓仪测定精细陶瓷膜和陶瓷涂层膜厚的方法。 该方法适用于10 nm至10 000 nm范围内的薄膜厚度。 注：该方法要求基材的涂层部分和未涂层部分之间有明显且清晰的边界。 [外文原描述]： ISO 18452:2005 specifies a method for the determination of the film thickness of a fine ceramic film and ceramic coatings by a contact-probe profilometer. The method is suitable for film thicknesses in the range of 10 nm to 10 000 nm.
英文名称Fine ceramics (advanced ceramics, advanced technical ceramics) — Determination of thickness of ceramic films by contact-probe profilometer