表面化学分析.纳米到微米范围内束基方法横向分辨率和锐度的测定

[中文适用范围]： 本文件描述了在成像表面化学分析中测量横向分辨率和清晰度的方法。 它适用于在仪器的定义设置下使用光束分析表面化学成分的所有表面分析方法。 它适用于扫描仪器，其中精细聚焦的光束在预先选定的视场中扫描样品，也适用于全视场成像仪器，其中视场同时由宽光束、成像透镜系统和像素化探测器。 测量横向分辨率和清晰度的方法是——直尺法； ——窄线法； ——光栅法。 本文件适用于提供纳米厚度层以及纳米尺寸结构和单个纳米物体表面信息的仪器和方法。 [外文原描述]： This document describes methods for measuring lateral resolution and sharpness in imaging surface chemical analysis. It applies to all methods of surface analysis which use a beam to analyse the chemical composition of surfaces under defined settings of an instrument. It applies to scanning instruments, where a finely focused beam is scanned over the sample in a preselected field of view, as well as to full field imaging instruments, where the field of view is simultaneously imaged by a broad beam, an imaging lens system and a pixelated detector. The methods for measuring lateral resolution and sharpness are — the straight edge method; — the narrow line method; — the grating method. This document applies to instruments and methods that provide information on layers with nanometre thicknesses and to surfaces with nanometre‐sized structures and individual nano‐objects.