标准摘要
[中文适用范围]： 本国际标准提供了一个简单的程序，用于识别、估计和校正因X射线辐射在X射线光电子能谱（XPS）分析过程中对材料元素组成或化学状态的非预期降解。本国际标准不涉及不同类型材料之间的比较，也不涉及降解机制、深度或化学性质。建议的校正程序仅在变化是由X射线引起且导致选定光电子峰强度减少或增加小于30%时有效。 [外文原描述]： ISO 18554:2016 provides a simple procedure for identifying, estimating and correcting for unintended degradation in the elemental composition or chemical state of a material which occurs as a result of X-radiation during the time that a specimen material is exposed to the X-rays used in X-ray photoelectron spectroscopy (XPS). ISO 18554:2016 does not address comparisons between different types of material nor does it address the mechanisms, depth, or chemical nature of the degradation that occurs. The correction procedure proposed is only valid if the changes are caused by the X-rays and result in less than a 30 % reduction or increase in intensity of a chosen photoelectron peak from the sample material.
英文名称Surface chemical analysis — Electron spectroscopies — Procedures for identifying, estimating and correcting for unintended degradation by X-rays in a material undergoing analysis by X-ray photoelectron spectroscopy