标准摘要
[中文适用范围]： 本文件规定了一种程序，通过该程序可以根据常见分析情况下特定样品的数据来估计 X 射线光电子能谱 (XPS) 中的元素检测限并进行报告。 本文件适用于均质材料，如果元素的深度分布在技术的信息深度内不均匀，则不适用。 [外文原描述]： ISO 19668:2017 specifies a procedure by which elemental detection limits in X-ray photoelectron spectroscopy (XPS) can be estimated from data for a particular sample in common analytical situations and reported. This document is applicable to homogeneous materials and is not applicable if the depth distribution of elements is inhomogeneous within the information depth of the technique.
英文名称Surface chemical analysis — X-ray photoelectron spectroscopy — Estimating and reporting detection limits for elements in homogeneous materials