标准摘要
[中文适用范围]: 本文件确定了皮拉尼真空计的参数及其校准程序,并描述了操作这些真空计时要考虑的测量不确定性。 本文件适用于在 0.01 Pa 至 150 kPa 压力范围内运行的皮拉尼真空计。 在校准皮拉尼真空计并将其用作参考标准时,本文件对 ISO 3567 和 ISO 27893 进行了补充。 此外,本文件还定义了表征皮拉尼真空计响应时间和迟滞特性的程序。 [外文原描述]: ISO 19685:2017 identifies parameters of Pirani gauges, their calibration procedure, and describes measurement uncertainties to be considered when operating these gauges. ISO 19685:2017 applies to Pirani vacuum gauges operating over a pressure range of 0,01 Pa to 150 kPa. ISO 19685:2017 complements ISO 3567 and ISO 27893 when calibrating Pirani gauges and using them as reference standards. In addition, ISO 19685:2017 defines procedures to characterize Pirani gauges for response time and hysteresis.
英文名称Vacuum technology — Vacuum gauges — Specifications, calibration and measurement uncertainties for Pirani gauges