激光器和激光器相关设备. 角分辨散射的试验方法

[中文适用范围]： 本文件描述了通过光学元件（例如涂层或未涂层的光学元件、光子结构以及透明、半透明或不透明的材料）确定角度分辨散射的程序。 它包括散射到样本周围的散射球中，通常分为后半球和前半球。 该程序适用于从极紫外 5 nm 到红外光谱范围 15 µm 的辐射波长。 [外文原描述]： This document describes procedures for the determination of the angle resolved scattering by optical components such as coated or uncoated optical elements, photonic structures, and materials that can be transparent, translucent, or opaque. It comprises scattering into the scattering sphere around the specimen usually separated into the backward and forward hemispheres. The procedures apply to wavelengths of radiation ranging from 5 nm in the extreme ultraviolet to 15 µm in the infrared spectral ranges.