标准摘要
[中文适用范围]： 本文件定义了与电容隔膜真空计 (CDG) 相关的术语，指定了必须为 CDG 提供的参数，详细说明了其校准程序，并描述了操作这些真空计时必须考虑的测量不确定度。 在校准 CDG 并将其用作参考标准时，本文件对 ISO 3567 和 ISO 27893 进行了补充。 [外文原描述]： This document defines terms related to capacitance diaphragm gauges (CDGs), specifies which parameters have to be given for CDGs, details their calibration procedure and describes which measurement uncertainties have to be considered when operating these gauges. This document complements ISO 3567 and ISO 27893 when calibrating CDGs and using them as reference standards.
英文名称Vacuum technology — Vacuum gauges — Specifications, calibration and measurement uncertainties for capacitance diaphragm gauges