标准摘要
[中文适用范围]： 1 本国际标准规定了在使用多个 Delta 层参考材料的 SIMS 深度剖析中估计三个深度分辨率参数（即前沿衰减长度、后沿衰减长度和高斯展宽）的程序。 2 本国际标准不适用于三角洲层，因为近地表区域的化学和物理状态因入射初级离子的改变而未处于稳定状态。 [外文原描述]： ISO 20341:2003 specifies procedures for estimating three depth resolution parameters, viz the leading-edge decay length, the trailing-edge decay length and the Gaussian broadening, in SIMS depth profiling using multiple delta-layer reference materials. It is not applicable to delta-layers where the chemical and physical state of the near-surface region, modified by the incident primary ions, is not in the steady state.
英文名称Surface chemical analysis — Secondary-ion mass spectrometry — Method for estimating depth resolution parameters with multiple delta-layer reference materials