标准摘要
[中文适用范围]： 本文件规定了一种在脉冲计数磁扇形二次离子质谱仪或四极二次离子质谱仪中确定强度尺度线性可接受偏差极限的最大计数率的方法。 它使用基于参考材料中两种同位素深度剖面分析的测试，该参考材料在低浓度和高浓度范围之间具有逐渐的浓度变化。 它还包括对探测器死区时间引起的饱和强度的校正方法。 校正可以增加 95% 线性度的强度范围，以便对于相关校正方程已被证明有效的那些光谱仪可以采用更高的最大计数率。 本文件不适用于飞行时间质谱仪。 本文件仅适用于含有少量同位素的元素。 如果元素是单一同位素或含有相同丰度的同位素，则不适用。 [外文原描述]： ISO 20411:2018 specifies a method for determining the maximum count rate for an acceptable limit of divergence from linearity of the intensity scale in pulse counting magnetic sector-type secondary ion mass spectrometers or quadrupole secondary ion mass spectrometers. It uses a test based on depth profile analysis of two isotopes in a reference material which has a gradual concentration change between low and high concentration regimes. It also includes a correction method for saturated intensity caused by the dead time of the detector. The correction can increase the intensity range for 95 % linearity so that a higher maximum count rate can be employed for those spectrometers for which the relevant correction equations have been shown to be valid. ISO 20411:2018 does not apply to time of flight mass spectrometers. ISO 20411:2018 is only applicable to elements with minor isotopes. It is not applicable if the element is monoisotopic or contains isotopes with equal abundances.
英文名称Surface chemical analysis — Secondary ion mass spectrometry — Correction method for saturated intensity in single ion counting dynamic secondary ion mass spectrometry