碳基薄膜.分类和命名

[中文适用范围]： 本文件规定了碳基薄膜的分类、名称和简称。 这些薄膜以碳为主要组成部分，并通过物理气相沉积 (PVD) 或化学气相沉积 (CVD) 工艺沉积。 这包括非晶碳基薄膜，也称为类金刚石碳薄膜 (DLC)，以及 CVD 金刚石薄膜、石墨和类聚合物薄膜。 本文件适用于工业规模生产的薄膜。 其他碳基薄膜正在开发中。 本文件涉及碳基薄膜的材料。 它并不是指由主要功能层和下面或上面的附加层组成的整个涂层。 层的成分和/或材料特性可以随着其厚度的变化而变化。 这样的层称为梯度层。 本文档中的定义指的是非渐变层。 碳基膜可以包括其他元素，如氢、金属元素或其他。 金属成分可以作为金属碳化物包含在内。 如果碳是主要成分，则本文件仅涵盖含有附加元素的薄膜。 以碳化物形式掺入的碳，如可存在于含金属的无定形碳膜（aC:Me、aC:H:Me）中的碳，不计入该数量。 本文件不适用于富勒烯、碳纳米管和石墨烯等碳材料。 [外文原描述]： ISO 20523:2017 specifies classification, designations and short names for carbon based films. These are films in which carbon is the predominant constituent part and which are deposited by physical vapour deposition (PVD) or chemical vapour deposition (CVD) process. This includes amorphous carbon-based films, also called diamond-like carbon films (DLC), as well as CVD diamond films, graphite and polymer-like films. ISO 20523:2017 is applicable to those films which are produced on an industrial scale. Additional carbon based films are under development. ISO 20523:2017 refers to the material of carbon based films. It does not refer to the entire coating that can consist of a main functional layer with additional layers below or on top. A layer can change in composition and/or material property over its thickness. Such layers are called gradient layers. The definitions in this document refer to non-gradient layers. A carbon based film can include other elements like hydrogen, metal elements or others. Metal constituents can be included as metal carbides. Films with additional elements are only covered by this document if carbon is the predominant constituent part. Carbon incorporated as carbide, as can be present in metal-containing amorphous carbon films (a-C:Me, a-C:H:Me), does not count to this amount. ISO 20523:2017 does not apply to the class of carbon materials such as fullerenes, carbon nanotubes and graphene.