真空技术.测量真空泵性能的标准方法.第4部分：涡轮分子真空泵

[中文适用范围]： 本文件与 ISO 21360-1 一起规定了涡轮分子真空泵性能特征的测量方法。 它适用于所有尺寸和所有类型的涡轮分子真空泵，包括带有机械或磁力轴承的涡轮分子真空泵； ——轴上有或没有附加的拖动级或其他泵级； ——带有一个或多个入口。 由于涡轮分子真空泵由主泵支持，因此其性能不能完全由体积流量曲线来定义。 此外，涡轮分子真空泵的驱动装置和前级压力对其性能也很重要。 以下是完整的性能特征： ——有关涡轮分子真空泵的吞吐量和前级压力的信息； ——压缩比曲线（压缩比与涡轮分子真空泵的前级压力）。 [外文原描述]： This document, in conjunction with ISO 21360-1, specifies methods for the measurement of performance characteristics of turbomolecular vacuum pumps. It is applicable to all sizes and all types of turbomolecular vacuum pumps, including those — with mechanical or magnetic bearings; — with or without an additional drag stage(s) or other pumping stages on the shaft; — with one or more inlet ports. Since turbomolecular vacuum pumps are backed by primary pumps, their performance cannot be completely defined by the volume flow rate curve. Also, the driving device and the backing pressure of the turbomolecular vacuum pump is important to the performance. The following completes the performance characteristics: — information about throughputs and backing pressure of the turbomolecular vacuum pump; — the compression ratio curve (compression ratio vs backing pressure of turbomolecular vacuum pump).