真空技术 — 测量真空泵性能的标准方法 — 第 5 部分：非蒸发吸气剂 (NEG) 真空泵

[中文适用范围]： 本文件规定了非蒸散性吸气剂（NEG）抽气特性的测量方法。它适用于所有尺寸和类型的 NEG，包括： — 丸状、盘状、环状、条状、模块状、筒状； — 具有泵结构； — 管道和真空室内表面的 NEG 涂层。NEG 和其他真空泵的抽气特性的一个显著区别是 NEG 的抽气特性取决于吸附量。此外，特别是在 NEG 涂层的情况下，粘附概率而不是抽气速度通常是抽气性能的指标。因此，本文件规定了测量 NEG 的抽气速度、吸附量和粘附概率的方法。警告 — 假定用户熟悉可燃气体和有毒气体的处理以及超高真空技术。 [外文原描述]： This document specifies methods for the measurement of pumping characteristics of non-evaporable getters (NEGs). It is applicable to all sizes and all types of NEGs, including those: — with the shape of pill, disk, ring, strip, module, cartridge; — with pump structures; — and NEG coatings on inner surface of pipes and vacuum chamber. A significant difference of pumping characteristics of the NEG and other vacuum pumps is that the pumping speed of the NEG depends on the sorption quantity. Furthermore, especially in the case of NEG coating, the sticking probability rather than the pumping speed is often the index of the pumping performance. Therefore, this document specifies the methods for measuring the pumping speed, the sorption quantity, and the sticking probability of NEGs. WARNING It is assumed that the user is familiar with the handling of combustible gases and poisonous ones and with ultra-high vacuum technology.