标准摘要
[中文适用范围]： 本标准规定了低温真空泵的体积流量、最大流量、抽气能力、底压低温真空泵、冷却时间和交叉值的测量方法。本标准适用于双级、闭环气态氦低温真空泵，可直接法兰连接到真空室。 [外文原描述]： This document specifies methods for measuring the volume flow rate, maximum throughput, pumping capacity, base pressure cryogenic vacuum pump, cooldown time and crossover value of cryogenic vacuum pumps. It is applicable to two-stage, closed-loop gaseous helium cryogenic vacuum pumps, which can be directly flanged to a vacuum chamber.
英文名称Vacuum technology — Standard methods for measuring vacuum-pump performance — Part 6: Cryogenic vacuum pumps