标准摘要
[中文适用范围]： 本文件描述了光散射气载颗粒计数器（LSAPC）的校准和验证方法，用于测量空气中悬浮颗粒的粒径分布和颗粒数浓度。 本文件中描述的光散射方法基于单粒子测量。 通过该方法测量的颗粒的典型尺寸范围在0.1μm至10μm之间。 符合本文件的仪器用于根据 ISO 14644-1 和 ISO 14644-2 对洁净室和相关受控环境中的空气洁净度进行分类，以及测量各种环境中颗粒的数量和尺寸分布。 下列参数属于本文件范围： ——尺寸设置错误； ——计数效率； ——尺寸分辨率； ——错误计数； ——最大颗粒数浓度； ——采样流量误差； ——采样时间误差； - 反应速度; ——校准间隔； ——报告测试和校准的结果。 [外文原描述]： This document describes a calibration and verification method for a light scattering airborne particle counter (LSAPC), which is used to measure the size distribution and particle number concentration of particles suspended in air. The light scattering method described in this document is based on single particle measurements. The typical size range of particles measured by this method is between 0,1 μm and 10 μm in particle size. Instruments that conform to this document are used for the classification of air cleanliness in cleanrooms and associated controlled environments in accordance with ISO 14644‑1 and ISO 14644‑2, as well as the measurement of number and size distribution of particles in various environments. The following parameters are within the scope of this document: — size setting error; — counting efficiency; — size resolution; — false count; — maximum particle number concentration; — sampling flow rate error; — sampling time error; — response rate; — calibration interval; — reporting results from test and calibration.
英文名称Determination of particle size distribution — Single particle light interaction methods — Part 4: Light scattering airborne particle counter for clean spaces