标准摘要
[中文适用范围]： 本文件规定了采用平行X射线束的XRD方法测量单晶薄膜（晶圆）结晶质量的测试方法。 本文件适用于所有作为体或外延层结构的单晶薄膜（晶圆）。 [外文原描述]： This document specifies the test method for measuring the crystalline quality of single-crystal thin film (wafer) using the XRD method with parallel X-ray beam. This document is applicable to all of the single-crystal thin film (wafer) as bulk or epitaxial layer structure.
英文名称Fine ceramics (advanced ceramics, advanced technical ceramics) — Test method for crystalline quality of single-crystal thin film (wafer) using XRD method with parallel X-ray beam