椭圆偏振法 第二部分：体材料模型

[中文适用范围]： 本标准规定了通过椭偏测量并利用体材料模型确定材料光学常数或介电常数的过程及其分析方法。若严格满足体材料模型的假设条件，则可直接测定材料的光学常数（折射率n 和消光系数k）或介电常数（实部ε1 和虚部ε2）。否则，可测定光学或介电“伪常数”，该伪常数取决于测量时的入射角θ。在不同入射角下测得的相关光谱范围内伪常数的一致性程度，是验证体材料模型有效性或质量的必要前提。 [外文原描述]： This document specifies the process for determining the optical or dielectric constants by means of ellipsometric measurements and their analysis based on the bulk material model. If the assumptions of the bulk material model are strictly met, it is possible to determine the optical constants (refractive index n and extinction coefficient k) or the dielectric constants (real part ε1 and imaginary part ε2) of the material directly. Alternatively, optical (<n> and <k>) or dielectric (<ε1> and <ε2>) pseudo constants are determined, which depend on the measurement angle of incidence φ. The degree of consistency of the pseudo constants in the relevant spectral range, determined from measurements at different angles of incidence, represents a necessary prerequisite for the validity or quality of the bulk material model.