标准摘要
[中文适用范围]： 本文件规定了通过认可的测试实验室确定紫外-可见-近红外光谱范围内的光学和介电常数以及在线生产控制、质量保证和材料开发领域的层厚度的方法。 它适用于独立的测量系统。 结果不确定度的表示符合ISO/IEC Guide 98-3。 [外文原描述]： This document specifies a method for determining optical and dielectric constants in the UV-VIS-NIR spectral range as well as layer thicknesses in the field of at-line production control, quality assurance and material development through accredited test laboratories. It is applicable to stand-alone measuring systems. The presentation of the uncertainty of results conforms to ISO/IEC Guide 98-3.
英文名称Ellipsometry — Principles