标准摘要
[中文适用范围]： 本文采用椭圆偏振测量及其分析方法，规定在光谱区域内基于k=0条件的透明单层模型，测定透明层厚度、光学常数（折射率n）或介电常数实部（e₁）的方法。 [外文原描述]： This document uses ellipsometric measurements and their analysis to specify the method for the determination of the layer thickness d of a transparent layer and the optical (refractive index n) or dielectric (real part ε1) constants/functions based on the transparent single layer model within a spectral region, for which k = 0 applies.
英文名称Ellipsometry — Part 3: Transparent single layer model