标准摘要
[中文适用范围]： 本文件规定了扫描透射电子显微镜或配备电子能量损失（EEL）能谱仪的透射电子显微镜能量分辨率的测定程序。 本文件适用于柱内式EEL光谱仪和柱后式EEL光谱仪。 这些EEL信号检测系统适用于并行检测系统和串行检测系统。 [外文原描述]： This document specifies a determination procedure of energy resolution in the scanning transmission electron microscope or the transmission electron microscope equipped with the electron energy loss (EEL) spectrometer. This document is applicable to both in-column type EEL spectrometer and post-column type EEL spectrometer. These EEL signal detecting systems are applicable to a parallel detecting system and a serial detecting system.
英文名称Microbeam analysis — Analytical electron microscopy — Method for the determination of energy resolution for electron energy loss spectrum analysis