标准摘要
[中文适用范围]： 本国际标准规定了用于一般分析目的、使用束流能量为 2 keV 或更高的电子枪评估俄歇电子能谱仪强度标度的稳定性和重复性的方法。 它仅适用于配备离子枪进行溅射清洁的仪器。 它并不是为了校准强度/能量响应函数。 该校准可以由仪器制造商或其他组织进行。 本程序提供数据来评估和确认强度/能量响应函数在仪器使用中保持恒定的准确性。 对可能影响这种稳定性的一些仪器设置给出了指导。 [外文原描述]： ISO 24236:2005 specifies a method for evaluating the constancy and repeatability of the intensity scale of Auger electron spectrometers, for general analytical purposes, using an electron gun with a beam energy of 2 keV or greater. It is only applicable to instruments that incorporate an ion gun for sputter cleaning. It is not intended to be a calibration of the intensity/energy response function. That calibration may be made by the instrument manufacturer or other organization. The present procedure provides data to evaluate and confirm the accuracy with which the intensity/energy response function remains constant with instrument usage. Guidance is given on some of the instrumental settings that may affect this constancy.
英文名称Surface chemical analysis — Auger electron spectroscopy — Repeatability and constancy of intensity scale