标准摘要
[中文适用范围]： 本国际标准规定了用于一般分析目的，使用非单色铝或镁 X 射线或单色铝 X 射线评估 X 射线光电子能谱仪强度标度的重复性和稳定性的方法。 它仅适用于配备离子枪进行溅射清洁的仪器。 它并不是为了校准强度/能量响应函数。 该校准可以由仪器制造商或其他组织进行。 本程序提供数据来评估和确认强度/能量响应函数在仪器使用中保持恒定的准确性。 对可能影响这种稳定性的一些仪器设置给出了指导。 [外文原描述]： ISO 24237:2005 specifies a method for evaluating the repeatability and constancy of the intensity scale of X-ray photoelectron spectrometers, for general analytical purposes, using unmonochromated Al or Mg X-rays or monochromated Al X-rays. It is only applicable to instruments that incorporate an ion gun for sputter cleaning. It is not intended to be a calibration of the intensity/energy response function. That calibration may be made by the instrument manufacturer or other organization. The present procedure provides data to evaluate and confirm the accuracy with which the intensity/energy response function remains constant with instrument usage. Guidance is given on some of the instrument settings that may affect this constancy.
英文名称Surface chemical analysis — X-ray photoelectron spectroscopy — Repeatability and constancy of intensity scale