标准摘要
[中文适用范围]： 本文件定义了与旋转式罗盘真空计（SRGs）相关的术语[2]-[4]，指定了 SRG 的要求参数，详细说明了 SRG 校准程序，并描述了在使用这些测量仪时需要考虑的测量不确定度。本文件适用于压力不超过 2帕斯卡的情况 [外文原描述]： This document defines terms related to spinning rotor gauges (SRGs) [ 2 ]-[ 4 ] , specifies required parameters for SRGs, details the SRG calibration procedure and describes which measurement uncertainties to consider when operating these gauges. This document is applicable to pressure up to 2 Pa.
英文名称Vacuum technology — Vacuum gauges — Specifications, calibration and measurement uncertainties for spinning rotor gauges