标准摘要
[中文适用范围]： 本文件规定了一种基于白光轴向色差的共焦色散探针的非接触式仪器的设计和计量特性，用于测量表面纹理。更多计量特性可参见ISO 25178-600。由于可以从三维表面形貌数据中提取表面轮廓，因此本文件中描述的方法也适用于轮廓测量。 [外文原描述]： This document specifies the design and metrological characteristics of a particular non-contact instrument for measuring surface texture using a confocal chromatic probe based on axial chromatic aberration of white light. Additional metrological characteristics can be found in ISO 25178-600. Because surface profiles can be extracted from areal surface topography data, the methods described in this document are also applicable to profiling measurements.
英文名称Geometrical product specifications (GPS) — Surface texture: Areal — Part 602: Design and characteristics of non-contact (confocal chromatic probe) instruments