标准摘要
[中文适用范围]： 本文件规定了用于测量表面形貌的全场移相干涉仪（PSI）仪器的设计和计量特性。由于可以从全场表面形貌数据中提取表面轮廓，因此本文所述方法也适用于轮廓测量。 [外文原描述]： This document specifies the design and metrological characteristics of phase shifting interferometry (PSI) instruments for the areal measurement of surface topography. Because surface profiles can be extracted from areal surface topography data, the methods described in this document are also applicable to profiling measurements.
英文名称Geometrical product specifications (GPS) — Surface texture: Areal — Part 603: Design and characteristics of non-contact (phase shifting interferometry) instruments