标准摘要
[中文适用范围]： 本文件指定了点聚焦探针（PAP）仪器的设计和计量特性，用于表面形貌的面积测量。由于可以从前表面地形数据中提取轮廓信息，因此本文件所述方法也适用于轮廓测量。 [外文原描述]： This document specifies the design and metrological characteristics of point autofocus probe (PAP) instruments for the areal measurement of surface topography. Because surface profiles can be extracted from areal surface topography data, the methods described in this document are also applicable to profiling measurements.
英文名称Geometrical product specifications (GPS) — Surface texture: Areal — Part 605: Design and characteristics of non-contact (point autofocus probe) instruments