几何产品规范（GPS） 表面纹理:面积 第606部分:非接触（焦点变化）仪器的设计和特性

[中文适用范围]： 本文件规定了用于表面形貌面积测量的聚焦变化仪器的设计和特性。由于可以从表面形貌面积数据中提取表面轮廓，因此本文件中描述的方法也适用于轮廓测量。本文件适用于无图案照明或固定图案照明的聚焦变化。本文件不包括测量过程中使用变化图案照明的方法。 [外文原描述]： This document specifies the design and characteristics of focus variation instruments for areal measurement of surface topography. Because surface profiles can be extracted from areal surface topography data, the methods described in this document are also applicable to profiling measurements as well. This document applies to focus variation without pattern illumination or with fixed pattern illumination. This document does not cover methods using varying pattern illumination during the measurement.