标准摘要
[中文适用范围]： 本文件描述了用于表面形貌面积测量的共焦显微镜系统的影响量和仪器特性。 由于可以从表面形貌图像中提取表面轮廓，因此本文档中描述的方法也可以应用于轮廓测量。 [外文原描述]： This document describes the influence quantities and instrument characteristics of confocal microscopy systems for areal measurement of surface topography. Because surface profiles can be extracted from surface topography images, the methods described in this document can be applied to profiling measurements as well.
英文名称Geometrical product specifications (GPS) — Surface texture: Areal — Part 607: Nominal characteristics of non-contact (confocal microscopy) instruments