标准摘要
[中文适用范围]： 本文件规定了区域形貌测量仪器共有的计量特性的校准、调整和验证的通用程序，如所述。 由于表面轮廓可以从表面形貌图像中提取，因此本文件中描述的大多数方法都可以适用于轮廓分析仪器。 本文档不涉及仪器特定的问题。 例如，对于基于机械探测的仪器，其中探头遵循附加的弧形运动，ISO 25178-701 中规定了附加措施。 本文件不包括区域积分方法的程序，尽管 ISO 25178-6 中也有这些规定。 例如，光散射属于一类称为区域积分方法的技术，用于测量表面形貌。 [外文原描述]： This document specifies generic procedures for the calibration, adjustment and verification of metrological characteristics that areal topography measuring instruments have in common, as stated in ISO 25178 - 600 . Because surface profiles can be extracted from surface topography images, most of the methods described in this document can be adapted to profiling instruments. Instrument-specific issues are not covered by this document. For example, for instruments based on mechanical probing where the probe follows an additional arcuate motion, additional measures are specified in ISO 25178 - 701 . This document does not include procedures for area-integrating methods, although those are also stated in ISO 25178 - 6 . For example, light scattering belongs to a class of techniques known as area-integrating methods for measuring surface topography.
英文名称Geometrical product specifications (GPS) — Surface texture: Areal — Part 700: Calibration, adjustment and verification of areal topography measuring instruments