标准摘要
[中文适用范围]： 本国际标准规定了用于真空系统中控制气体流量或真空压力的真空阀的泄漏测试方法。适用于可关闭至小于 1 × 10⁻⁵ Pa·m³/s（针对示踪气体）泄漏率的真空阀。该方法采用本国际标准中规定的阀体密封装置。这些方法适用于验证阀门规格。 在操作期间及操作后，阀门泄漏率低于制造商规定的标称泄漏率，可确定此类阀门的操作条件，如操作压力范围、端口间允许的压力差、烘烤温度或操作温度以及寿命周期。 注 1：大型阀门和无阀体阀门的数据可能与交付检验时获得的数据不同，具体取决于真空设备连接面的精度。 注 2：本程序获得的数据基于对单个真空阀单元的测试，如果测试是在阀门集成到设备中时进行的，则可能与交付检验时获得的数据不同。 [外文原描述]： ISO 27895:2009 specifies methods for the leak testing of vacuum valves used for control of gas flow or vacuum pressure in a vacuum system.It is applicable to vacuum valves that can be closed to leak rates less than 1 x 10 - 5 Pa m 3 /s for trace gas. The methods employ a sealing arrangement for the valve body, which is also specified in ISO 27895:2009. The methods are suitable for the verification of valve specifications. A valve leak rate less than the nominal leak rate specified by the manufacturer during and after the operation enables the specification of such valve operating conditions as operating pressure range, permissible pressure difference between ports, bake-out temperature or operating temperature, and life cycle.
英文名称Vacuum technology — Valves — Leak test