标准摘要
[中文适用范围]： 仅描述了具有集成高真空系统以将质谱仪的传感元件保持在低压的检漏仪。 概述了两个程序，一个用于确定最小可检测泄漏率，另一个用于确定最小可检测浓度比。 [外文原描述]： Only leak detectors are described which have an integral high vacuum system to maintain the sensing element of the mass spectrometer at a low pressure. Two procedures are outlined, one to determine the minimum detectable leak rate and the other for determination of the minimum detectable concentration ratio.
英文名称Vacuum technology — Mass-spectrometer-type leak-detector calibration