微束分析

[中文适用范围]： MSA/MAS/AMAS 高维数据文件规范（简称 HMSA）是一种独立于平台的数据格式，允许在不同软件应用程序之间交换高维显微镜和微观分析数据。这些应用程序包括但不限于：— 高光谱图，例如电子能量损失谱 (EELS)、能量色散 x 射线光谱 (XEDS) 或阴极发光光谱 (CL)。— “超图像”图，例如使用电子背散射衍射 (EBSD) 或会聚束电子衍射 (CBED) 的图案图。— 3 维图，例如共焦显微镜或聚焦离子束 (FIB) 连续切片图。— 4 维图，例如双倾斜电子断层扫描。— 时间分辨显微镜和光谱。除了存储超维数据外，HMSA 文件格式还适用于存储常规显微镜和微分析数据，例如光谱、线轮廓、图像和定量分析，以及实验条件和其他元数据。 [外文原描述]： The MSA/MAS/AMAS hyper-dimensional data file specification (HMSA, for short) is a platform-independent data format to permit the exchange of hyper-dimensional microscopy and microanalytical data between different software applications. The applications include, but are not limited to: — Hyper-spectral maps, such as electron energy loss spectroscopy (EELS), energy dispersive x-ray spectrometry (XEDS), or cathodoluminescence spectroscopy (CL). — ‘Hyper-image’ maps, such as pattern maps using electron backscatter diffraction (EBSD) or convergent beam electron diffraction (CBED). — 3-dimensional maps, such as confocal microscopy, or focused ion beam (FIB) serial section maps. — 4-dimensional maps, such as double-tilt electron tomography. — Time-resolved microscopy and spectroscopy. In addition to storing hyper-dimensional data, the HMSA file format is applicable for storing conventional microscopy and microanalysis data, such as spectra, line profiles, images, and quantitative analyses, as well as experimental conditions and other metadata.