金属涂层.涂层厚度的测量.扫描电子显微镜法

[中文适用范围]： 本文件规定了通过扫描电子显微镜（SEM）检查横截面来测量金属和其他无机涂层局部厚度的破坏性方法。 该方法适用于厚度达几毫米的情况，但对于如此厚的涂层，使用光学显微镜通常更实用（参见 ISO 1463）。 厚度下限取决于所达到的测量不确定度（参见第 10 条）。 注：当有机层既未因横截面制备或成像过程中的电子束而损坏时，该方法也可用于有机层。 [外文原描述]： This document specifies a destructive method for the measurement of the local thickness of metallic and other inorganic coatings by examination of cross-sections with a scanning electron microscope (SEM). The method is applicable for thicknesses up to several millimetres, but for such thick coatings it is usually more practical to use a light microscope (see ISO 1463). The lower thickness limit depends on the achieved measurement uncertainty (see Clause 10). NOTE The method can also be used for organic layers when they are neither damaged by the preparation of the cross-section nor by the electron beam during imaging.