纳米技术.词汇.第8部分:纳米制造工艺

[中文适用范围]： 本文件界定了纳米制造过程中涉及的术语。虽然本文件中列出的所有工艺术语均与纳米制造相关，但其中许多工艺并不完全专用于纳米尺度。非专用术语已在定义中标明。根据可控制条件，这些过程可能会产生纳米尺度或更大尺度的材料特征。与纳米制造相关的大量其他术语命名了工具、组件、材料、系统控制方法或计量方法，超出了本文件的范围。ISO/TS 80004系列的其他部分中的术语和定义在第3章中重复以供参考和更好理解。 [外文原描述]： This document defines terms related to nanomanufacturing processes in the field of nanotechnologies. All the process terms in this document are relevant to nanomanufacturing, however, many of the listed processes are not exclusively relevant to the nanoscale. Terms that are not exclusive are noted within the definitions. Depending on controllable conditions, such processes can result in material features at the nanoscale or, alternatively, at larger scales. There are many other terms that name tools, components, materials, systems control methods or metrology methods associated with nanomanufacturing that are beyond the scope of this document. Terms and definitions from other parts of the ISO/TS 80004 series are reproduced in Clause 3 for context and better understanding.